Sökning: "Curt Edström"

Hittade 1 uppsats innehållade orden Curt Edström.

  1. 1. Wet etching of optical thin films

    Master-uppsats, JTH, Kemiteknik

    Författare :Curt Edström; [2010]
    Nyckelord :Thin film; Wet etching; Optical coating; Physical vapour deposition;

    Sammanfattning : Evaluation of the wet etching properties of several different thin film oxidesgrown by physical vapour deposition was performed in this work. MgO, Al2O3,SiO2, TiO2, HfO2 ZrO2 and Y2O3 were coated on two types of substrates; Si andborosilicate glass and etching tests were performed in different etchingsolutions. LÄS MER