Sökning: "Otkur Wutikuer"

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  1. 1. Fabrication and Characterization of 4H-SiC MOS Capacitors with Different Dielectric Layer Treatments

    Master-uppsats, Linköpings universitet/Halvledarmaterial

    Författare :Otkur Wutikuer; [2018]
    Nyckelord :4H-SiC; MOS capacitor; Dielectric layer; PECVD; C-V measurement; Interface states.;

    Sammanfattning : 4H-SiC based Metal-Oxide Semiconductor(MOS) capacitors are promising key components for next generation power devices. For high frequency power applications, however, there is a major drawback of this type of devices, i.e. LÄS MER