Sökning: "Andrea Ferrario"

Hittade 1 uppsats innehållade orden Andrea Ferrario.

  1. 1. Processing and characterization of self-aligned Ni/Al and Co ohmic contacts to 4H-SiC

    Master-uppsats, KTH/Skolan för elektroteknik och datavetenskap (EECS)

    Författare :Andrea Ferrario; [2018]
    Nyckelord :;

    Sammanfattning : New self-aligned silicide processes for the realization of Ni/Al and Co contacts to silicon carbide (4H-SiC) are presented and contacts are characterized using the transfer length method (TLM). Since cobalt silicide formation on 4H-SiC has not been investigated before, interface reaction between Co and 4H-SiC as well as the study on the annealing temperatures constitute an essential part of this work. LÄS MER