Sökning: "Chung-Chuan Lai"

Hittade 1 uppsats innehållade orden Chung-Chuan Lai.

  1. 1. Growth and Phase Stability of Titanium Aluminum Nitride Deposited by High Power Impulse Magnetron Sputtering

    Master-uppsats, Plasma och beläggningsfysik

    Författare :Chung-Chuan Lai; [2011]
    Nyckelord :HiPIMS; co-sputtering; diffusion; microstructure; spinodal decomposition; Ti1-xAlxN;

    Sammanfattning : In this work, we investigate the relation between the diffusion behavior of Ti1-xAlxN at elevated temperatures and the microstructure. Thinfilm samples are synthesized by reactive co-sputtering with two cathodes. LÄS MER