Sökning: "Daniel Magnfält"

Hittade 1 uppsats innehållade orden Daniel Magnfält.

  1. 1. Alternative method for deposition of alumina thin films

    Master-uppsats, Institutionen för fysik, kemi och biologi

    Författare :Daniel Magnfält; [2009]
    Nyckelord :alumina; RF-sputtering; hydrogen; fluorine; amorphous alumina; aluminiumoxid; RF-sputtering; väte; fluor; amorft aluminumoxid;

    Sammanfattning : Deposition of alumina thin films in the presence of fluorine as a method for reducing thehydrogen incorporation in the films was investigated in this thesis. Hydrogen incorporated in alumina thin films have been shown to cause a lower density and refractive index in amorphous films, assist electrical conduction through thin amorphous films as well as inhibiting the formation of the thermally stable α-phase. LÄS MER