Sökning: "EUV litografi"

Hittade 1 uppsats innehållade orden EUV litografi.

  1. 1. Offline study of next generation EUV pellicle materials and performances : From experimental design to material characterization

    Master-uppsats, KTH/Skolan för elektroteknik och datavetenskap (EECS)

    Författare :Susanna Licheri; [2019]
    Nyckelord :Semiconductors; Nanotechnology; EUV Lithography; EUV Pellicle; Qualification study; Halvledare; nanoteknik; EUV litografi; EUV Pellicle; kvalificerings studie;

    Sammanfattning : Lithography is the most crucial step in the semiconductor microfabrication workflow. Continuous features size shrinking co-occurs with the reduction of the exposure wavelength: a move from 193 nm light to extreme ultra-violet (EUV) at 13.5 nm is performed. The change poses a vast number of challenges that have been overcome in the past years. LÄS MER