Sökning: "EUV litografi"
Hittade 1 uppsats innehållade orden EUV litografi.
1. Offline study of next generation EUV pellicle materials and performances : From experimental design to material characterization
Master-uppsats, KTH/Skolan för elektroteknik och datavetenskap (EECS)Sammanfattning : Lithography is the most crucial step in the semiconductor microfabrication workflow. Continuous features size shrinking co-occurs with the reduction of the exposure wavelength: a move from 193 nm light to extreme ultra-violet (EUV) at 13.5 nm is performed. The change poses a vast number of challenges that have been overcome in the past years. LÄS MER
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