Sökning: "Ernesto Vargas Catalan"

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  1. 1. Design and Manufacturing of a Rotationally Symmetric Cold Gas Nozzle in Silicon

    Uppsats för yrkesexamina på avancerad nivå, Ångström Space Technology Centre (ÅSTC)

    Författare :Ernesto Vargas Catalan; [2012]
    Nyckelord :Etching; Micronozzle; Microloading; RIE lag; Silicon; Rotationally symmetric;

    Sammanfattning : In this master thesis, the goal was to devise design patterns and a fabrication processfor manufacturing a 3-D rotationally symmetric converging-diverging cold gasmicronozzle in silicon.The report explains the theory of etching and the methods involved. The work beginswith calculations and simulations of the etching processes. LÄS MER