Sökning: "ICP-RIE"
Hittade 4 uppsatser innehållade ordet ICP-RIE.
1. Real- and Quasi-Atomic Layer Etching for Ultra-High Resolution Patterning
Master-uppsats, Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionenSammanfattning : An attempt was made at developing atomic layer etching from a cyclic etching process in an ICP-RIE tool. During the process OES was used for contamination monitoring and estimation of the relative amount of Cl2 left in the chamber during the etch step of cyclic etching processes. LÄS MER
2. Investigation on the Optimization of GaN Etching for FinFET Applications
Master-uppsats, Lunds universitet/Institutionen för elektro- och informationsteknikSammanfattning : In the framework of this thesis, the optimization of the etching process of GaN for FinFET applications has been investigated. FinFETs are transistors with a vertical architecture in the shape of fins. These fins are fabricated by etching a pattern into a GaN substrate. The etching is carried out in two steps, a dry etch and a wet etch. LÄS MER
3. Inductively-Coupled Plasma Etching for Nanoimprint Si-masters
Master-uppsats, Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionenSammanfattning : In the last decades, engineers have been pushing semiconductor technology towards fabricating ever smaller devices, and will eventually pass the lower limit of currently commonplace optical lithographic techniques. New techniques have been developed, such as nanoimprint lithography. LÄS MER
4. Optical Properties of Silicon Nanopillar Arrays for Biosensing
Master-uppsats, KTH/Skolan för informations- och kommunikationsteknik (ICT)Sammanfattning : Biosensing is currently a growing research field which is relevant for different applications, for instance in health care. Sensitive and cheap biosensors are required, preferably as simple as possible in their working principle. LÄS MER
