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  1. 1. A study on the effects of the process parameters of polymerised HMDSO using RF-PECVD in corrosion protection applications

    Master-uppsats, Linköpings universitet/Tunnfilmsfysik

    Författare :Madeleine Ardic; Anton Gifvars; [2017]
    Nyckelord :;

    Sammanfattning : In this master thesis the effects of the process parameters of pp-HMDSO were studied in the application of corrosion protection of an Al surface. The method for polymerising the HMDSO vapour was RF-PECVD. LÄS MER