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1. A study on the effects of the process parameters of polymerised HMDSO using RF-PECVD in corrosion protection applications
Master-uppsats, Linköpings universitet/TunnfilmsfysikSammanfattning : In this master thesis the effects of the process parameters of pp-HMDSO were studied in the application of corrosion protection of an Al surface. The method for polymerising the HMDSO vapour was RF-PECVD. LÄS MER
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