Sökning: "Md Sabbir Ahmed Khan"

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  1. 1. Evaluation of Atomic Layer Etching Possibility at Lund Nano Lab

    Master-uppsats, Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionen

    Författare :Md Sabbir Ahmed Khan; [2016]
    Nyckelord :Atomic Layer Etching; Nanoimprint lithography; Nanowires; Physics and Astronomy;

    Sammanfattning : In modern electronics, device downscaling demands atomic precision control and Atomic Layer Etching (ALE) can provide this prime capability with minute device damage. ALE, also known as layer-by-layer etching, is a technique of removing atomically thin layers from the surface of materials in a controlled way. LÄS MER