Sökning: "Md Sabbir Ahmed Khan"
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1. Evaluation of Atomic Layer Etching Possibility at Lund Nano Lab
Master-uppsats, Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionenSammanfattning : In modern electronics, device downscaling demands atomic precision control and Atomic Layer Etching (ALE) can provide this prime capability with minute device damage. ALE, also known as layer-by-layer etching, is a technique of removing atomically thin layers from the surface of materials in a controlled way. LÄS MER
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