Sökning: "N-vacancies"

Hittade 1 uppsats innehållade ordet N-vacancies.

  1. 1. Study of ohmic contact formation on AlGaN/GaN heterostructures

    Master-uppsats, KTH/Skolan för elektroteknik och datavetenskap (EECS)

    Författare :Kai-Hsin Wen; [2019]
    Nyckelord :ohmic contacts; wide bandgap; Ta-based; recess etch; N-vacancies;

    Sammanfattning : It is challenging to achieve low-resistive ohmic contacts to III-nitride semiconductors due to their wide bandgap. A common way to reduce the contact resistance is to recess the ohmic area prior to metallization. LÄS MER