Sökning: "Nanopakning"
Hittade 1 uppsats innehållade ordet Nanopakning.
1. Block Copolymer Lithographyfor Nano-porous Oxide Thin Films
Master-uppsats, KTH/Skolan för elektroteknik och datavetenskap (EECS)Sammanfattning : This thesis focuses on employing a new patterning technique called block copolymer lithography to transfer the nano-porous pattern from the polymer template to the underlying oxide thin film. Nano-porous block copolymer films are produced by spin-coating polymer solution on wafers followed by annealing, UV exposure and development processes. LÄS MER
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