Sökning: "Nanopakning"

Hittade 1 uppsats innehållade ordet Nanopakning.

  1. 1. Block Copolymer Lithographyfor Nano-porous Oxide Thin Films

    Master-uppsats, KTH/Skolan för elektroteknik och datavetenskap (EECS)

    Författare :Yandi Liu; [2018]
    Nyckelord :Block Copolymer; Lithography; Nanopatterning; Reactive-Ion Etching; Oxide Thin Films; Blockcopolymer; Litografi; Nanopakning; Reaktion-Jon Etsning; Oxidtunnfilmerna;

    Sammanfattning : This thesis focuses on employing a new patterning technique called block copolymer lithography to transfer the nano-porous pattern from the polymer template to the underlying oxide thin film. Nano-porous block copolymer films are produced by spin-coating polymer solution on wafers followed by annealing, UV exposure and development processes. LÄS MER