Sökning: "SiO2 PVD"

Hittade 3 uppsatser innehållade orden SiO2 PVD.

1. 1. Fabrication of surface enhanced Raman spectroscopy (SERS) active substrates based on vertically aligned nitrogen doped carbon nanotube forest

   Master-uppsats, Umeå universitet/Institutionen för fysik

   Författare :Md Khorshed Alam; [2015]
   Nyckelord :Photolithography; Physical Vapor Deposition; Chemical Vapor Deposition; Annealing; Scanning Electron Microscopy; Surface Enhanced Raman Spectroscopy;

   Sammanfattning : This thesis work describes the fabrication and surface enhanced Raman spectroscopy (SERS) characterization of vertically aligned nitrogen (N) doped multi walled carbon nanotube (MWCNT) forests coated by silver (Ag) and gold (Au) nanoparticles. In the present work, the CNT forests were grown from a catalyst metal layer by the chemical vapor deposition (CVD) process at temperature of 800 oC and a physical vapor deposition (PVD) and annealing processes were applied subsequently for the evaporation and diffusion of noble metal nanoparticles on the forest. LÄS MER

3. 2. A process recipe for bonding a silicone membrane to a plastic substrate

   Kandidat-uppsats, Institutionen för teknikvetenskaper

   Författare :Linus Schönström; Anna Nordh; Anton Strignert; Frida Lemel; Jakob Ekengard; Sofie Wallin; Zargham Jabri; [2013]
   Nyckelord :bonding silicone; corona surface treater; SiO2 coating; thermoplastic substrate; PVD temperature; PDMS membrane; spin-coating; thickness measurements; microfluidic systems; bonding PDMS; silicon dioxide coating; spin-cast; silicone membrane; PDMS; polydimethylsiloxane; poly dimethylsiloxane ; silicon dioxide PVD; SiO2 PVD; silicon dioxide evaporation; SiO2 evaporation; thickness of a thin film; silicon dioxide deposition; SiO2 deposition; adhesion testing; cycloolefincopolymer; cycloolefinpolymer; cyclic olefin copolymer; cyclic olefin polymer; COC; COP; plasma surface treater; surface activator; surface oxidizer;

   Sammanfattning : A spin-cast silicone membrane has been successfully bonded between two injection-molded microstructured plastic discs. This sandwich structure creates a useful platform for mass production of microfluidic systems, provided that the bonds are leakproof. LÄS MER

4. 3. Wet etching of optical thin films

   Master-uppsats, JTH, Kemiteknik

   Författare :Curt Edström; [2010]
   Nyckelord :Thin film; Wet etching; Optical coating; Physical vapour deposition;

   Sammanfattning : Evaluation of the wet etching properties of several different thin film oxidesgrown by physical vapour deposition was performed in this work. MgO, Al2O3,SiO2, TiO2, HfO2 ZrO2 and Y2O3 were coated on two types of substrates; Si andborosilicate glass and etching tests were performed in different etchingsolutions. LÄS MER