Sökning: "Wet Etching"
Visar resultat 1 - 5 av 18 uppsatser innehållade orden Wet Etching.
1. Real- and Quasi-Atomic Layer Etching for Ultra-High Resolution Patterning
Master-uppsats, Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionenSammanfattning : An attempt was made at developing atomic layer etching from a cyclic etching process in an ICP-RIE tool. During the process OES was used for contamination monitoring and estimation of the relative amount of Cl2 left in the chamber during the etch step of cyclic etching processes. LÄS MER
2. Developing an Ar milling process to improve the contact quality to InAs nanowires
Kandidat-uppsats, Lunds universitet/Fysiska institutionen; Lunds universitet/Fasta tillståndets fysikSammanfattning : The aim of this work was to develop a stable and reproducible argon milling process for InAs nanowires to remove the native oxide layer that increases electrical resistance. This was done by identifying a few milling parameters and studying them in relation to the milling rate of silicon dioxide (SiO2). LÄS MER
3. Investigation on the Optimization of GaN Etching for FinFET Applications
Master-uppsats, Lunds universitet/Institutionen för elektro- och informationsteknikSammanfattning : In the framework of this thesis, the optimization of the etching process of GaN for FinFET applications has been investigated. FinFETs are transistors with a vertical architecture in the shape of fins. These fins are fabricated by etching a pattern into a GaN substrate. The etching is carried out in two steps, a dry etch and a wet etch. LÄS MER
4. Work function engineering for high temperature FD-SOI transistors
Master-uppsats, KTH/Skolan för elektroteknik och datavetenskap (EECS)Sammanfattning : Various applications require the MOSFETs that work at a high temperature which is ambient operating temperature higher than 125 ℃. However, the traditional bulk MOSFETs at high temperature suffers from high leakage currents and threshold voltage shift, thus the performance of the bulk MOSFETs is severely degraded. LÄS MER
5. Design and fabrication of Si diaphragms for capacitive pressure sensors in high-pressure microfluidics
Uppsats för yrkesexamina på avancerad nivå, Uppsala universitet/MikrosystemteknikSammanfattning : The pressure has a major impact when it comes to control of chemical processes. A method for integrating electrical pressure sensors in high-pressure microfluidic chips has, however, so far not been developed and the aim of this project was therefore to study how capacitive pressure sensors could be designed and fabricated to measure pressures between 1-100 bar. LÄS MER
