Sökning: "aluminiumoxide"

Hittade 3 uppsatser innehållade ordet aluminiumoxide.

  1. 1. Investigating and Fabricating High-K (Al2O3) and Ferroelectric (HfO2) MIM-Capacitors for use in BEOL Fabrication Applications

    Master-uppsats, KTH/Skolan för elektroteknik och datavetenskap (EECS)

    Författare :Thomas Hackett; [2021]
    Nyckelord :atomic layer deposition ALD ; ferroelectric; metal-insulator-metal MIM capacitors; low thermal budget; rapid thermal annealing RTA ;

    Sammanfattning : Integration of high-K Metal-Insulator-Metal (MIM) capacitors in the Back-end-of-line (BEOL) is a topic of interest for the further development of the process at KTH Royal Institute of Technology. MIM-capacitors benefit from having constant capacitance values over a range of voltages and/or frequencies. LÄS MER

  3. 2. Processing of Sub-micrometer Features for Rear Contact Passivation Layer of Ultrathin Film Solar Cells Using Optical Lithography

    Kandidat-uppsats,

    Författare :Evelina Roxner; Ronja Olsmats Baumeister; [2019]
    Nyckelord :nanofabrication; optical lithography; photo lithography; line contacts; microfabrication; rear contact passivation; passivation layer; sub-micrometer features; thin film; ultra-thin film; solar cells; CIGS; aluminiumoxide;

    Sammanfattning : Thin film copper, indium, gallium, selenide (CIGS) solar cells are promising in the field of photovoltaic technology. To reduce material and fabrication cost, as well as increasing electrical properties of the cell, research is ongoing towards ultra-thin film solar cells (absorption layer thickness less than 500 nm). LÄS MER

  4. 3. Controlled interlayer between titanium carbon-nitride and aluminiumoxide

    Uppsats för yrkesexamina på avancerad nivå, Institutionen för materialkemi

    Författare :Sara Munktell von Fieandt; [2011]
    Nyckelord :Aluminium oxide; titanium oxide; titanium carbon-nitride; Chemical Vapour Deposition; Atomic Layer Deposition;

    Sammanfattning : In the industry of metal cutting tools the conditions are extreme; the temperature can vary thousand degrees rapidly and the pressure can be tremendously high. To survive this kind of stress the cutting tool must be both hard and tough. In order to obtain these properties different coatings are used on a base of cemented carbide, WC-Co. LÄS MER