Sökning: "hot-wall MOCVD system"
Hittade 1 uppsats innehållade orden hot-wall MOCVD system.
1. Optimization of gas flow uniformity in enhancement of Metal Organic Chemical Vapor Deposition growth for III-nitrides
Master-uppsats, Linköpings universitet/HalvledarmaterialSammanfattning : The thesis focuses on the gas flow profile optimization of a non-conventional injector in a hot-wall MOCVD system. The injector’s gas flow profile is simulated with CFD and demonstrates awell-behaved laminar flow with a parabolic profile. LÄS MER
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