Sökning: "hot-wall MOCVD system"

Hittade 1 uppsats innehållade orden hot-wall MOCVD system.

  1. 1. Optimization of gas flow uniformity in enhancement of Metal Organic Chemical Vapor Deposition growth for III-nitrides

    Master-uppsats, Linköpings universitet/Halvledarmaterial

    Författare :Kevin Olsson; [2019]
    Nyckelord :material science; mocvd; gan; semiconductors; gallium; nitride; fluid dynamics; termoelements; thermocouple; injector; heat transfer; thermal distribution; graphite; HEMT; III-nitrides; hot-wall MOCVD system; GaN-on-SiC; gas flow profile; laminar flow;

    Sammanfattning : The thesis focuses on the gas flow profile optimization of a non-conventional injector in a hot-wall MOCVD system. The injector’s gas flow profile is simulated with CFD and demonstrates awell-behaved laminar flow with a parabolic profile. LÄS MER