Sökning: "metalorganic vapor phase epitaxy"

Hittade 1 uppsats innehållade orden metalorganic vapor phase epitaxy.

  1. 1. Epitaxial growth and processing of high-aspect ratio InGaAs fins for advanced MOSFETs

    Master-uppsats, Lunds universitet/Fysiska institutionen; Lunds universitet/Fasta tillståndets fysik

    Författare :Andreas Malmgren; [2017]
    Nyckelord :FinFET; metalorganic vapor phase epitaxy; reciprocal space mapping; Technology and Engineering; Physics and Astronomy;

    Sammanfattning : In this thesis, InGaAs fins with vertical sidewalls consisting of {110} facets were epitaxially grown on InP(111)B substrates using metalorganic vapor phase epitaxy. A lithography patterned hydrogen silsesquixane growth mask was used to promote the formation of vertical {110} facets during the growth. LÄS MER