Sökning: "reactive sputtering"
Visar resultat 1 - 5 av 22 uppsatser innehållade orden reactive sputtering.
1. Real- and Quasi-Atomic Layer Etching for Ultra-High Resolution Patterning
Master-uppsats, Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionenSammanfattning : An attempt was made at developing atomic layer etching from a cyclic etching process in an ICP-RIE tool. During the process OES was used for contamination monitoring and estimation of the relative amount of Cl2 left in the chamber during the etch step of cyclic etching processes. LÄS MER
2. Heteroepitaxial Growth of GaN Film on Si substrate by Magnetron Sputtering
Master-uppsats, Linköpings universitet/Institutionen för fysik, kemi och biologiSammanfattning : In this study, the effect of AlN buffer layer structure and morphology on the GaN films deposited on Si (111) substrate by reactive DC magnetron sputtering have been studied. For structural and morphological characterization X-ray diffraction (XRD) and Scanning electron microscope (SEM) were used. LÄS MER
3. Photocatalytic activity of titanium dioxide thin films deposited with high power impulse magnetron sputtering
Uppsats för yrkesexamina på avancerad nivå, Uppsala universitet/Fasta tillståndets elektronikSammanfattning : High power impulse magnetron sputtering has shown a lot of promise as a way of depositing photocatalytic thin films of titanium dioxide at low temperatures, however, the films deposited are often amorphous and display uncertain photocatalytic abilities. This thesis explores the deposition and characterization of photocatalytic thin films deposited with high power impulse magnetron sputtering. LÄS MER
4. Multicomponent TiNbCrAl nitride films produced by DCMS and HiPIMS
Master-uppsats, Linköpings universitet/TunnfilmsfysikSammanfattning : High entropy alloys (HEAs) are made of at least five principal elements in near-equimolar proportions. The vast number of possible alloys and unconventional combinations of properties are the main benefits of HEAs. Ti, Nb, Cr, Al and N were chosen in order to create a hard, corrosion resistant coating with good thermal stability. LÄS MER
5. Correlating Photoconductivity with Photochromism in Oxygen-containing Rare-earth Metal Hydride Thin Films
Master-uppsats, Uppsala universitet/MaterialfysikSammanfattning : Scientists have recently discovered simultaneous photoconductivity and photochromism (i.e., optical switching upon light exposure) of oxygen-containing rare-earth metal hydrides (REMHO). A deep understanding of these extraordinary optical and electrical properties can open the door to advanced technological uses such as smart windows. LÄS MER