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Visar resultat 1 - 5 av 96 uppsatser som matchar ovanstående sökkriterier.

  1. 1. Real- and Quasi-Atomic Layer Etching for Ultra-High Resolution Patterning

    Master-uppsats, Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionen

    Författare :Yoana Ilarionova; [2023]
    Nyckelord :Physics and Astronomy;

    Sammanfattning : An attempt was made at developing atomic layer etching from a cyclic etching process in an ICP-RIE tool. During the process OES was used for contamination monitoring and estimation of the relative amount of Cl2 left in the chamber during the etch step of cyclic etching processes. LÄS MER

  3. 2. Crystallinity of Sputtered TiO2 Thin Films: a Study of the Heating and Plasma Influence on the Growth

    Master-uppsats,

    Författare :oussama ezzaher; [2023]
    Nyckelord :;

    Sammanfattning : AbstractHigh-Power Impulse Magnetron Sputtering (HIPIMS) of TiO2 thin films enhances their photocatalyticproperties compared to the films prepared by standard sputtering methods, especially when no substrateheating is employed. With no heating, the coatings present an amorphous structure that benefits from theionization of the sputtered flux granted by HiPIMS, with respect to their photocatalytic performance. LÄS MER

  4. 3. Ion and ENA precipitation onto the upper atmosphere of Venus : Estimate of precipitation maps using data from a hybrid model

    Master-uppsats, KTH/Skolan för elektroteknik och datavetenskap (EECS)

    Författare :Lorenzo Obersnel; [2023]
    Nyckelord :Eneregetic Neutral Atoms; Venus; Ion precipitation; ENA precipitation; Atomi Neutri Energetici; Venere; precipitazione di ioni; precipitazione di atomi neutri; Energisk Neutral Atom; Venus; Utfällningen joner; Utfällningen Energisk Neutral Atom;

    Sammanfattning : Venus does not have a strong intrinsic magnetic field as the Earth, and its magnetosphere is induced by the interaction of the solar wind with the ionosphere. The near-Venus space environment is characterized by the presence of a bow shock and of an induced magnetic boundary linked to the interplanetary magnetic field orientation. LÄS MER

  5. 4. Ion Induced Particle Desorption From Self Supporting Nanomembranes : Influence of Different Geometries and Particle Types

    Kandidat-uppsats, Uppsala universitet/Tillämpad kärnfysik

    Författare :Jonas Beling; [2023]
    Nyckelord :ion; physics; ion physic; scattering; desorption; sputtering; jon; fysik; jonfysik;

    Sammanfattning : Nanoelectronics is a field undergoing rapid development, meaning knowledge of the materials and methods used in nano-scale systems is a driving force in the industry. Silicon is a well known material in nanoelectronics commonly used as a semiconductor and is therefore a good representative for nanomaterials in general. LÄS MER

  7. 5. Heteroepitaxial Growth of GaN Film on Si substrate by Magnetron Sputtering

    Master-uppsats, Linköpings universitet/Institutionen för fysik, kemi och biologi

    Författare :Zahra Mohammadianrasnani; [2023]
    Nyckelord :GaN; Sputter epitaxy; Thin film;

    Sammanfattning : In this study, the effect of AlN buffer layer structure and morphology on the GaN films deposited on Si (111) substrate by reactive DC magnetron sputtering have been studied. For structural and morphological characterization X-ray diffraction (XRD) and Scanning electron microscope (SEM) were used. LÄS MER