Sökning: "Ksenia Anokhina"

Hittade 1 uppsats innehållade orden Ksenia Anokhina.

  1. 1. Investigation of Metal-assisted Si Etching for Fabrication of Nanoimprint Lithography Stamps

    Magister-uppsats, Sektionen för Informationsvetenskap, Data– och Elektroteknik (IDE)

    Författare :Ksenia Anokhina; [2010]
    Nyckelord :metal-assisted chemical etching; nanoimprint stamps;

    Sammanfattning : This diploma thesis deals with the investigation of the metal-assisted catalytic etching (MaCE) of Si. One of the main goals is to study fabrication of stamps for nanoimprint lithography using MaCE. Formation of nanoporous silicon (PSi), Si nanowires (SiNWs) and three-dimensional nanostructures in Si by MaCE is demonstrated. LÄS MER