Sökning: "Iterative methods for disturbance supression"

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  1. 1. Iterative Evaluation and Control Methods for Disturbance Suppression on a High Precision Motion Servo

    Master-uppsats, Linköpings universitet/Institutionen för systemteknik

    Författare :Claes Thunberg; Klara Kastensson; [2023]
    Nyckelord :Iterative feedback tuning; Iterative learning control; high precision motion control; Iterative methods for disturbance supression;

    Sammanfattning : Moore’s law states that the number of transistors in an Integrated Circuit (IC) doubles every two years. Ever-increasing performance in mask writing machinery is therefore required being the first step in the manufacturing process. Many factors affect the quality of the end product, with the motion control system playing an important role. LÄS MER