Sökning: "metal-assisted chemical etching"

Hittade 2 uppsatser innehållade orden metal-assisted chemical etching.

  1. 1. Metal-assisted etching of nanopores in silicon

    Master-uppsats, KTH/Skolan för informations- och kommunikationsteknik (ICT)

    Författare :Alexander Mörsdorf; [2014]
    Nyckelord :;

    Sammanfattning : Nanoporous membranes are an interesting approach to manufacture a variety of devices for different applications. For example in biomedicine the separation of molecules or cells or the sequence-based analysis of single-stranded DNA are of great interest. LÄS MER

  3. 2. Investigation of Metal-assisted Si Etching for Fabrication of Nanoimprint Lithography Stamps

    Magister-uppsats, Sektionen för Informationsvetenskap, Data– och Elektroteknik (IDE)

    Författare :Ksenia Anokhina; [2010]
    Nyckelord :metal-assisted chemical etching; nanoimprint stamps;

    Sammanfattning : This diploma thesis deals with the investigation of the metal-assisted catalytic etching (MaCE) of Si. One of the main goals is to study fabrication of stamps for nanoimprint lithography using MaCE. Formation of nanoporous silicon (PSi), Si nanowires (SiNWs) and three-dimensional nanostructures in Si by MaCE is demonstrated. LÄS MER