Sökning: "Pamburayi Mpofu"

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  1. 1. Homebuilt reactor design and atomic layer deposition of metal oxide thin films

    Master-uppsats, Linköpings universitet/Institutionen för fysik, kemi och biologi

    Författare :Pamburayi Mpofu; [2021]
    Nyckelord :Thin films; atomic layer deposition;

    Sammanfattning : This research thesis covers work done on building an atomic layer deposition (ALD) reactor followed by the development and optimization of an ALD process for indium oxide thin films on crystalline silicon substrates from new precursors using this new homebuilt cost-effective tool. This work describes the design, building and testing of the ALD system using an indium triazenide precursor and water in a novel precursor combination. LÄS MER