Sökning: "plasma sputtering"

Visar resultat 1 - 5 av 23 uppsatser innehållade orden plasma sputtering.

  1. 1. Real- and Quasi-Atomic Layer Etching for Ultra-High Resolution Patterning

    Master-uppsats, Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionen

    Författare :Yoana Ilarionova; [2023]
    Nyckelord :Physics and Astronomy;

    Sammanfattning : An attempt was made at developing atomic layer etching from a cyclic etching process in an ICP-RIE tool. During the process OES was used for contamination monitoring and estimation of the relative amount of Cl2 left in the chamber during the etch step of cyclic etching processes. LÄS MER

  3. 2. Crystallinity of Sputtered TiO2 Thin Films: a Study of the Heating and Plasma Influence on the Growth

    Master-uppsats,

    Författare :oussama ezzaher; [2023]
    Nyckelord :;

    Sammanfattning : AbstractHigh-Power Impulse Magnetron Sputtering (HIPIMS) of TiO2 thin films enhances their photocatalyticproperties compared to the films prepared by standard sputtering methods, especially when no substrateheating is employed. With no heating, the coatings present an amorphous structure that benefits from theionization of the sputtered flux granted by HiPIMS, with respect to their photocatalytic performance. LÄS MER

  4. 3. Ion and ENA precipitation onto the upper atmosphere of Venus : Estimate of precipitation maps using data from a hybrid model

    Master-uppsats, KTH/Skolan för elektroteknik och datavetenskap (EECS)

    Författare :Lorenzo Obersnel; [2023]
    Nyckelord :Eneregetic Neutral Atoms; Venus; Ion precipitation; ENA precipitation; Atomi Neutri Energetici; Venere; precipitazione di ioni; precipitazione di atomi neutri; Energisk Neutral Atom; Venus; Utfällningen joner; Utfällningen Energisk Neutral Atom;

    Sammanfattning : Venus does not have a strong intrinsic magnetic field as the Earth, and its magnetosphere is induced by the interaction of the solar wind with the ionosphere. The near-Venus space environment is characterized by the presence of a bow shock and of an induced magnetic boundary linked to the interplanetary magnetic field orientation. LÄS MER

  5. 4. Investigation of plasma cleaning on molybdenum crystals for diagnostic mirrors in fusion devices

    Master-uppsats, KTH/Skolan för elektroteknik och datavetenskap (EECS)

    Författare :Hafssa Laabadi; [2023]
    Nyckelord :;

    Sammanfattning : In the long-term energy scenario, nuclear fusion is a promising low-carbon and sustainable energy source. The unavoidable exposure of the wall materials to the plasma is a big challenge in realizing a fusion reactor. The plasma-facing components (PFCs) in the reactor wall will experience erosion deposition in the surface materials. LÄS MER

  7. 5. Magnetron Sputter Epitaxy of High-quality GaNand Plasma Characterization of the Process : Degree Project–Master’s Thesis

    Master-uppsats, Linköpings universitet/Tunnfilmsfysik

    Författare :Yi-Ling Lo; [2021]
    Nyckelord :GaN; Semiconductors; Nanomaterials; Thin film; Magnetron Sputtering; Epitaxy; XRD; Physical Vapor Deposition;

    Sammanfattning : Several sputtering depositions were done by direct current (DC) magnetron sputtering epitaxy (MSE) techniquefor the goal of improving the growth rate and crystalline quality of GaN thin film on Al2O3 substrate. Thegrowth rate was higher when substrate-to-target distance D = 7 cm compared with D = 9. LÄS MER