Sökning: "Yoana Ilarionova"

Hittade 2 uppsatser innehållade orden Yoana Ilarionova.

1. 1. Real- and Quasi-Atomic Layer Etching for Ultra-High Resolution Patterning

   Master-uppsats, Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionen

   Författare :Yoana Ilarionova; [2023]
   Nyckelord :Physics and Astronomy;

   Sammanfattning : An attempt was made at developing atomic layer etching from a cyclic etching process in an ICP-RIE tool. During the process OES was used for contamination monitoring and estimation of the relative amount of Cl2 left in the chamber during the etch step of cyclic etching processes. LÄS MER

3. 2. Evaluation of light scattering and absorption in aerosol nanowires

   Kandidat-uppsats, Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionen

   Författare :Yoana Ilarionova; [2019]
   Nyckelord :nanoscience; nanowire; Mie scattering; scattering cross section; Physics and Astronomy;

   Sammanfattning : Numerical models of the optical properties of a single nanowire are essential for reproducing the results of the measurements and understanding the optical processes. Intuitively, the properties of a single finitely long nanowire would converge to the ones for an infinitely long nanowire if it is long enough. LÄS MER