Sökning: "Nanoprocessing"

Hittade 3 uppsatser innehållade ordet Nanoprocessing.

  1. 1. Laminated HZO on InAs: A study of as-deposited ferroelectricity

    Master-uppsats, Lunds universitet/Institutionen för elektro- och informationsteknik

    Författare :André Andersen; [2022]
    Nyckelord :Ferroelectricity; HZO; InAs; III V; As-deposited ferroelectricity; BEOL; Nanoelectronics; Nanoprocessing; Nanotechnology; ALD; MOSCAP; Memory Technology; Technology and Engineering;

    Sammanfattning : As the limits of transistor feature size scaling is reaching its saturation, new innovations are needed to prevent performance loss. High performance transistors on the III/V semiconductor platform implemented with ferroelectric oxides might in the future satisfy this demand. LÄS MER

  3. 2. Block copolymer-based hybrid nanomaterials for nanoimprint applications

    Master-uppsats, Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Lunds Tekniska Högskola

    Författare :Philip Sellin; [2022]
    Nyckelord :Block copolymer; Sequential infiltration synthesis; Nanoimprint lithography; Reactive ion etching; Self-assembly; Thermal annealing; Solvent vapour annealing; Nanoprocessing; Nanofabrication; Antibacterial; Technology and Engineering;

    Sammanfattning : In this Master’s thesis project, a block copolymer (BCP) film was used in combination with sequential infiltration synthesis and etching to manufacture a nanoimprint lithography stamp consisting of silicon. The BCP film was designed to contain perpendicularly aligned hexagonally placed cylinders, a pattern that will later be investigated for antibacterial properties after being transferred via nanoimprint lithography to a polymer film. LÄS MER

  4. 3. Reactive Ion Etching of Silicon using F-based chemistry - Exploring the Limits

    Kandidat-uppsats, Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionen

    Författare :Harald Havir; [2018]
    Nyckelord :Reactive Ion Etching; Plasma Etching; CHF3; SF6; High Anisotropy; Physics and Astronomy;

    Sammanfattning : Dry Etching is widely used in nanoprocessing as a method of pattern transfer onto a hard substrate, like silicon. Improving the resolution of this etch process is an important step in reducing the feature size in, for instance, computer microchips, or Nanoimprint Lithography stamps. LÄS MER