Metod för mätning av restspänningar i PVD-beläggningar på tunna substrat

Sammanfattning: The aim of this project was to, based on a given idea, develop and evaluate a method for measuring residual stress in thin PVD coatings. AlCrN was deposited, by PVD, on thin circular samples of stainless steel foil and the radius of the emerged curvature was measured using an optical profilometer. From the radius data the residual stress in the coating of each sample was calculated. The foil samples examined were of two different thicknesses, 0.3 mm and 0.5 mm. With the parameters of the project the foils of 0.3 mm were found most suitable. Furthermore, the method was compared to an already established method where depositions are made on thicker substrates, which are then ground to an appropriate thickness. A correlation factor between the two methods was calculated and found to be 0.91 ± 0.28. Finally, the possibility of adapting the method in running production was investigated. Cost and time analyses were conducted and both supported the applicability of the method.