Sökning: "AlScN"

Hittade 1 uppsats innehållade ordet AlScN.

  1. 1. Study of HfN as seed layer for next generation of BAW RF filters : synthesis, characterization, and investigation of piezoelectric performance

    Uppsats för yrkesexamina på avancerad nivå, Luleå tekniska universitet/Institutionen för teknikvetenskap och matematik

    Författare :Eduard Llorens Balada; [2020]
    Nyckelord :HfN; AlScN; AlN; sputtering; XRD; SEM; seed layer; epitaxial growth;

    Sammanfattning : Micro-electro-mechanical systems (MEMS) have become an essential component of a wide range ofelectronic devices over the last decades such as accelerometers, microphones, gas sensors, and filters.During this new millennium, a new radio frequency (RF) technology has been developed to satisfy thetough demands that arose due to the implementation of 5G wireless communication: bulk acoustic wave(BAW) filters. LÄS MER