Sökning: "Plasma enhanced chemical vapor deposition"

Visar resultat 1 - 5 av 6 uppsatser innehållade orden Plasma enhanced chemical vapor deposition.

1. 1. Electrically Modified Quartz Crystal Microbalance to Study Surface Chemistry Using Plasma Electrons as Reducing Agents

   Master-uppsats, Linköpings universitet/Kemi

   Författare :Pentti Niiranen; [2021]
   Nyckelord :Plasma enhanced chemical vapor deposition; PECVD; Quartz crystal microbalance; QCM;

   Sammanfattning : Metallic films are important in various applications, such as electric devices where it can act as contacts. In electrical devices, the substrate typically consists of silicon dioxide (SiO2) which is a temperature-sensitive substrate. LÄS MER

3. 2. Fabrication and Characterization of 4H-SiC MOS Capacitors with Different Dielectric Layer Treatments

   Master-uppsats, Linköpings universitet/Halvledarmaterial

   Författare :Otkur Wutikuer; [2018]
   Nyckelord :4H-SiC; MOS capacitor; Dielectric layer; PECVD; C-V measurement; Interface states.;

   Sammanfattning : 4H-SiC based Metal-Oxide Semiconductor(MOS) capacitors are promising key components for next generation power devices. For high frequency power applications, however, there is a major drawback of this type of devices, i.e. LÄS MER

4. 3. Evaluation of graphene as a transparent electrode in GaN-based LEDs by PECVD synthesis of graphene directly on GaN

   Master-uppsats, Umeå universitet/Institutionen för fysik

   Författare :Linus Johansson; [2016]
   Nyckelord :PECVD; graphene; transparent electrode; gallium nitride; LED;

   Sammanfattning : A transparent conductive electrode (TCE) is an important component in many of our modern optoelectronic devices like photovoltaics, light emitting diodes and touch screens. These devices require good current injection and spreading as well as a high transparency. LÄS MER

5. 4. Rear side BSF/emitter patterning of SHJ-IBC solar cells using selective deposition and hydrogen plasma etching of a-Si:H

   Master-uppsats, KTH/Skolan för informations- och kommunikationsteknik (ICT)

   Författare :Mahmudul Hasan; [2016]
   Nyckelord :;

   Sammanfattning : Silicon heterojunction interdigitated back-contact (SHJ-IBC) solar cells have attracted considerable attention because of their potential to achieve very highly efficiency. However, the back contacting scheme leads to additional fabrication complexity mainly resulting from the formation of interdigitated n- (back surface field (BSF)) and p-type (emitter) hydrogenated amorphous silicon (aSi:H) strips. LÄS MER

7. 5. Optical Properties of Silicon Nanopillar Arrays for Biosensing

   Master-uppsats, KTH/Skolan för informations- och kommunikationsteknik (ICT)

   Författare :Inese Krasovska; [2014]
   Nyckelord :;

   Sammanfattning : Biosensing is currently a growing research field which is relevant for different applications, for instance in health care. Sensitive and cheap biosensors are required, preferably as simple as possible in their working principle. LÄS MER