Sökning: "triazenide"
Hittade 2 uppsatser innehållade ordet triazenide.
1. (1,3-di-tert-butyltriazenide) Cu(I) as vapor deposition precursor
Kandidat-uppsats, Linköpings universitet/KemiSammanfattning : In the past few decades, devices such as computers have become smaller, and their performance has improved beyond comparison. Semiconductors and interconnectors are used in almost all devices today and are made of thin films. LÄS MER
2. Homebuilt reactor design and atomic layer deposition of metal oxide thin films
Master-uppsats, Linköpings universitet/Institutionen för fysik, kemi och biologiSammanfattning : This research thesis covers work done on building an atomic layer deposition (ALD) reactor followed by the development and optimization of an ALD process for indium oxide thin films on crystalline silicon substrates from new precursors using this new homebuilt cost-effective tool. This work describes the design, building and testing of the ALD system using an indium triazenide precursor and water in a novel precursor combination. LÄS MER