Sökning: "Hot-Wall MOCVD"

Hittade 2 uppsatser innehållade orden Hot-Wall MOCVD.

  1. 1. Optimization of gas flow uniformity in enhancement of Metal Organic Chemical Vapor Deposition growth for III-nitrides

    Master-uppsats, Linköpings universitet/Halvledarmaterial

    Författare :Kevin Olsson; [2019]
    Nyckelord :material science; mocvd; gan; semiconductors; gallium; nitride; fluid dynamics; termoelements; thermocouple; injector; heat transfer; thermal distribution; graphite; HEMT; III-nitrides; hot-wall MOCVD system; GaN-on-SiC; gas flow profile; laminar flow;

    Sammanfattning : The thesis focuses on the gas flow profile optimization of a non-conventional injector in a hot-wall MOCVD system. The injector’s gas flow profile is simulated with CFD and demonstrates awell-behaved laminar flow with a parabolic profile. LÄS MER

  2. 2. Characterization of AlGaN HEMT structures

    Uppsats för yrkesexamina på grundnivå, Institutionen för fysik, kemi och biologi

    Författare :Anders Lundskog; [2007]
    Nyckelord :HEMT; Hot-Wall MOCVD; GaN; AlGaN; AlN exclusionlayer; Double heterojunction; 1D Poisson-Schrödinger;

    Sammanfattning : During the last decade, AlGaN High Electron Mobility Transistors (HEMTs) have been intensively studied because their fundamental electrical properties make them attractive for highpower microwave device applications. Despite much progress, AlGaN HEMTs are far from fully understood and judged by the number of published papers the understanding of advanced structures is even poorer. LÄS MER