Quantum Chemical Feasibility Study of Methylamines as Nitrogen Precursors in Chemical Vapor Deposition

Detta är en Kandidat-uppsats från Linköpings universitet/Kemi

Författare: Karl Rönnby; [2015]

Nyckelord: Quantum Chemistry; Computational Chemistry; Density Functional Theory DFT ; B3LYP; Gaussian 4 G4 ; Chemical Vapor Deposition CVD ; Gallium Nitride GaN ; Aluminum Nitride AlN ; Ammonia NH3 ; Methylamine NH2CH3 ; Dimethylamine NH CH3 2 ; Trimethylamine NH CH3 3 ; Trimethylaluminum TMA ; Trimethylgallium TMG ; Decomposition; Adsorption;

Sammanfattning: The possibility of using methylamines instead of ammonia as a nitrogen precursor for the CVD of nitrides is studied using quantum chemical computations of reaction energies: reaction electronic energy (Δ

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