Sökning: "silicon dioxide deposition"

Visar resultat 1 - 5 av 7 uppsatser innehållade orden silicon dioxide deposition.

  1. 1. Electrically Modified Quartz Crystal Microbalance to Study Surface Chemistry Using Plasma Electrons as Reducing Agents

    Master-uppsats, Linköpings universitet/Kemi

    Författare :Pentti Niiranen; [2021]
    Nyckelord :Plasma enhanced chemical vapor deposition; PECVD; Quartz crystal microbalance; QCM;

    Sammanfattning : Metallic films are important in various applications, such as electric devices where it can act as contacts. In electrical devices, the substrate typically consists of silicon dioxide (SiO2) which is a temperature-sensitive substrate. LÄS MER

  3. 2. Ferroelectricity in nanocrystalline Hf0.5Zr0.5O2 thin films

    Master-uppsats, Lunds universitet/Fasta tillståndets fysik; Lunds universitet/Fysiska institutionen

    Författare :Lun Sang; [2018]
    Nyckelord :ferroelectricity; Hf0.5Zr0.5O2; GIXRD; XRR; Technology and Engineering; Physics and Astronomy;

    Sammanfattning : Hafnium dioxide (HfO_2) based thin films doped with various dopants (Si, Ge, Al, Gd, Sr, Zr) have been found to exhibit ferroelectricity. These dopants were found to stabilize the III orthorhombic phase in the hafnium oxide based thin films. LÄS MER

  4. 3. Optical Properties of Silicon Nanopillar Arrays for Biosensing

    Master-uppsats, KTH/Skolan för informations- och kommunikationsteknik (ICT)

    Författare :Inese Krasovska; [2014]
    Nyckelord :;

    Sammanfattning : Biosensing is currently a growing research field which is relevant for different applications, for instance in health care. Sensitive and cheap biosensors are required, preferably as simple as possible in their working principle. LÄS MER

  5. 4. Current voltage characterization of high-k oxide on InGaAs substrate

    Master-uppsats, Lunds universitet/Fysiska institutionen; Lunds universitet/Fasta tillståndets fysik

    Författare :Muhammad Ismail; [2014]
    Nyckelord :Physics and Astronomy;

    Sammanfattning : Abstract Metal oxide semiconductor (MOS) capacitor was fabricated on the InGaAs substrate with Al2O3/HfO2 gate oxide. InGaAs is one of the promising candidates for advanced applications which require the lower power supply and high frequency. LÄS MER

  7. 5. A process recipe for bonding a silicone membrane to a plastic substrate

    Kandidat-uppsats, Institutionen för teknikvetenskaper

    Författare :Linus Schönström; Anna Nordh; Anton Strignert; Frida Lemel; Jakob Ekengard; Sofie Wallin; Zargham Jabri; [2013]
    Nyckelord :bonding silicone; corona surface treater; SiO2 coating; thermoplastic substrate; PVD temperature; PDMS membrane; spin-coating; thickness measurements; microfluidic systems; bonding PDMS; silicon dioxide coating; spin-cast; silicone membrane; PDMS; polydimethylsiloxane; poly dimethylsiloxane ; silicon dioxide PVD; SiO2 PVD; silicon dioxide evaporation; SiO2 evaporation; thickness of a thin film; silicon dioxide deposition; SiO2 deposition; adhesion testing; cycloolefincopolymer; cycloolefinpolymer; cyclic olefin copolymer; cyclic olefin polymer; COC; COP; plasma surface treater; surface activator; surface oxidizer;

    Sammanfattning : A spin-cast silicone membrane has been successfully bonded between two injection-molded microstructured plastic discs. This sandwich structure creates a useful platform for mass production of microfluidic systems, provided that the bonds are leakproof. LÄS MER