Sökning: "Aluminum Nitride AlN"

Hittade 2 uppsatser innehållade orden Aluminum Nitride AlN.

  1. 1. Quantum Chemical Feasibility Study of Methylamines as Nitrogen Precursors in Chemical Vapor Deposition

    Kandidat-uppsats, Linköpings universitet/Kemi

    Författare :Karl Rönnby; [2015]
    Nyckelord :Quantum Chemistry; Computational Chemistry; Density Functional Theory DFT ; B3LYP; Gaussian 4 G4 ; Chemical Vapor Deposition CVD ; Gallium Nitride GaN ; Aluminum Nitride AlN ; Ammonia NH3 ; Methylamine NH2CH3 ; Dimethylamine NH CH3 2 ; Trimethylamine NH CH3 3 ; Trimethylaluminum TMA ; Trimethylgallium TMG ; Decomposition; Adsorption;

    Sammanfattning : The possibility of using methylamines instead of ammonia as a nitrogen precursor for the CVD of nitrides is studied using quantum chemical computations of reaction energies: reaction electronic energy (Δ𝑟𝐸𝑒𝑙𝑒𝑐) reaction enthalpy (Δ𝑟𝐻) and reaction free energy (Δ𝑟𝐺). The reaction energies were calculated for three types of reactions: Uni- and bimolecular decomposition to more reactive nitrogen species, adduct forming with trimethylgallium (TMG) and trimethylaluminum (TMA) followed by a release of methane or ethane and surface adsorption to gallium nitride for both the unreacted ammonia or methylamines or the decomposition products. LÄS MER

  3. 2. Growth and Phase Stability of Titanium Aluminum Nitride Deposited by High Power Impulse Magnetron Sputtering

    Master-uppsats, Plasma och beläggningsfysik

    Författare :Chung-Chuan Lai; [2011]
    Nyckelord :HiPIMS; co-sputtering; diffusion; microstructure; spinodal decomposition; Ti1-xAlxN;

    Sammanfattning : In this work, we investigate the relation between the diffusion behavior of Ti1-xAlxN at elevated temperatures and the microstructure. Thinfilm samples are synthesized by reactive co-sputtering with two cathodes. LÄS MER