Sökning: "reactive sputtering"

Visar resultat 6 - 10 av 22 uppsatser innehållade orden reactive sputtering.

  1. 6. Study of HfN as seed layer for next generation of BAW RF filters : synthesis, characterization, and investigation of piezoelectric performance

    Uppsats för yrkesexamina på avancerad nivå, Luleå tekniska universitet/Institutionen för teknikvetenskap och matematik

    Författare :Eduard Llorens Balada; [2020]
    Nyckelord :HfN; AlScN; AlN; sputtering; XRD; SEM; seed layer; epitaxial growth;

    Sammanfattning : Micro-electro-mechanical systems (MEMS) have become an essential component of a wide range ofelectronic devices over the last decades such as accelerometers, microphones, gas sensors, and filters.During this new millennium, a new radio frequency (RF) technology has been developed to satisfy thetough demands that arose due to the implementation of 5G wireless communication: bulk acoustic wave(BAW) filters. LÄS MER

  2. 7. Sputtering of High Quality Layered MoS2 films

    Uppsats för yrkesexamina på avancerad nivå, Uppsala universitet/Fasta tillståndets elektronik

    Författare :Sari Abid Al Shaybany; [2020]
    Nyckelord :MoS2; molybdenum; molybdenum disulfide; sputtering; magnetron sputtering; high quality; sulfur; H2S; argon; pressure; temperature; high temperature; monolayer; few layers; large scale;

    Sammanfattning : We have deposited bulk, monolayer and few-layers as well as large-scale 2D layered MoS2 thin films by pulsed DC magnetron sputtering from an MoS2 target. MoS2 has gained great attention lately, together with other layered Transition Metal Dichalcogenides (TMDCs), for its unique optical and electrical properties with thickness-dependent bandgap. LÄS MER

  3. 8. Synthesis of thin films of the Olivines Fe2SiS4 and Mn2SiS4 by magnetron sputtering and annealing

    Uppsats för yrkesexamina på avancerad nivå, Uppsala universitet/Fasta tillståndets elektronik

    Författare :Joakim Eriksson; [2017]
    Nyckelord :photovoltaic; solar cell; thin film; semiconductor; absorber; abundant; olivine; ternary metal chalcogenides; manganese silicon sulfide; Mn2SiS4; iron silicon sulfide; Fe2SiS4; reactive magnetron sputtering; sulfurization; annealing; composition gradient; combinatorial; SEM; EDS; XRD; oxidation;

    Sammanfattning : The photovoltaic industry attracts a lot of interest from researchers worldwide due to active integration of the solar cells. The main idea here is to convert solar energy into electricity. One type of solar cell that shows potential in replacing today’s crystalline silicon cells is the thin film solar cell (TFSC). LÄS MER

  4. 9. Surface energy modification of metal oxide to enhance electron injection in light-emitting devices : charge balance in hybrid OLEDs and OLETs

    Master-uppsats, Högskolan i Gävle/Avdelningen för elektronik, matematik och naturvetenskap

    Författare :Sergio Apicella Fernandez; [2017]
    Nyckelord :organic; inorganic; semiconductors; OLEDs; OLETs; TFT; stack; thin-film; deposition; spin-coating; thermal; evaporation; process; reactive; sputtering; luminescence; EQE; PEIE; metal-oxide; ZnO; ZnO:N; MoO3; F8BT; Alq3; NPB;

    Sammanfattning : Organic semiconductors (OSCs) present an electron mobility lower by several orders of magnitude than the hole mobility, giving rise to an electron-hole charge imbalance in organic devices such as organic light-emitting diodes (OLEDs) and organic light-emitting transistors (OLETs). In this thesis project, I tried to achieve an efficient electron transport and injection properties in opto-electronic devices, using inorganic n-type metal oxides (MOs) instead of organic n-type materials and a polyethyleneimine ethoxylated (PEIE) thin layer as electron transport (ETLs) and injection layers (EILs), respectively. LÄS MER

  5. 10. Simulation of how pressure influences the reactive sputtering process

    Uppsats för yrkesexamina på avancerad nivå, Uppsala universitet/Fasta tillståndets elektronik

    Författare :Erik Strandberg; [2015]
    Nyckelord :thin film; sputtering; reactive sputtering; simulation; pressure; hysteresis;

    Sammanfattning : Sputtering is a physical vapor deposition (PVD) process used to create thin films, i.e very thin layers of material. To form compounds, such as oxides and nitrides, it may be beneficial to add a reactive gas to the process which is known as reactive sputtering. LÄS MER